Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment: Volume 81
Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment: Volume 81 Login for the JSON version of this page.
- Title
- Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment: Volume 81
- ISBN-10
- 0-08-043609-9
- ISBN-13
- 978-0-08-043609-8
- Author(s)
- Symposium F On Techniques And Challenges For 300 Mm Silicon 1998 Strasbourg France
- Publisher
- Elsevier, Elsevier Science
- Published
- 1999
- Format
- Hardcover
- Subtitle
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- Series
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- Imprint
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- Pages
- 178
- Language
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- Subjects
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- Genre
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Description
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Metadata
- EAN
- 9780080436098
- ASIN
- 0080436099
- Prefix
- 978
- Group
- 0
- Group Name
- English language
- Group Identifier
- 978-0
- Registrant
- 08
- Publication
- 043609
- Check Digit
- 8
- Formatted
- 978-0-08-043609-8