Materials and Processes for Submicron Technologies: Proceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS ... Research Society Symposia Proceedings)

Materials and Processes for Submicron Technologies: Proceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS ... Research Society Symposia Proceedings) Login for the JSON version of this page.

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Title: Materials and Processes for Submicron Technologies: Proceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS ... Research Society Symposia Proceedings)
ISBN-10: 0-08-043617-X
ISBN-13: 978-0-08-043617-3
Author(s)
Publisher: Elsevier Science
Published: 1999
Format: Hardcover
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Pages: 633
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Metadata

EAN: 9780080436173
ASIN: 008043617X
Prefix: 978
Group: 0
Group Name: English language
Group Identifier: 978-0
Registrant: 08
Publication: 043617
Check Digit: 3
Formatted: 978-0-08-043617-3

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