Plasma Deposition of Amorphous Silicon Based Materials

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Title: Plasma Deposition of Amorphous Silicon Based Materials
ISBN-10: 0-08-053910-6
ISBN-13: 978-0-08-053910-2
Author(s): Pio Capezzuto, Arun Madan
Publisher: Elsevier Science & Technology Books
Published: 1995
Format
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Pages: 102
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Description

Metadata

EAN: 9780080539102
ASIN: 0080539106
Prefix: 978
Group: 0
Group Name: English language
Group Identifier: 978-0
Registrant: 08
Publication: 053910
Check Digit: 2
Formatted: 978-0-08-053910-2

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