Chemical Mechanical Polishing in Silicon Processing

Chemical Mechanical Polishing in Silicon Processing Login for the JSON version of this page.

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Title: Chemical Mechanical Polishing in Silicon Processing
ISBN-10: 0-08-086461-9
ISBN-13: 978-0-08-086461-7
Author(s): R. K. Willardson, Miller Robert M., Eicke R. Weber, Shin M. Hwa Li
Publisher: Elsevier Science & Technology Books
Published: 1999
Format
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Pages: 795
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Description

Metadata

EAN: 9780080864617
ASIN: 0080864619
Prefix: 978
Group: 0
Group Name: English language
Group Identifier: 978-0
Registrant: 08
Publication: 086461
Check Digit: 7
Formatted: 978-0-08-086461-7

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