Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies Login for the JSON version of this page.

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Title: Handbook of Silicon Based MEMS Materials and Technologies
ISBN-10: 0-323-31223-3
ISBN-13: 978-0-323-31223-3
Author(s): Veikko Lindroos, Teruaki Motooka, Mervi Paulasto Krockel, Markku Tilli
Publisher: Elsevier Science & Technology Books
Published: 2015
Format
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Pages: 637
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Description

Metadata

EAN: 9780323312233
ASIN: 0323312233
Prefix: 978
Group: 0
Group Name: English language
Group Identifier: 978-0
Registrant: 323
Publication: 31223
Check Digit: 3
Formatted: 978-0-323-31223-3

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