Handbook of Silicon Wafer Cleaning Technology

Handbook of Silicon Wafer Cleaning Technology Login for the JSON version of this page.

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Title: Handbook of Silicon Wafer Cleaning Technology
ISBN-10: 0-323-51085-X
ISBN-13: 978-0-323-51085-1
Author(s): Karen Reinhardt, Werner Kern
Publisher: Elsevier Science & Technology Books
Published: 2018
Format
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Pages: 721
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Description

Metadata

EAN: 9780323510851
ASIN: 032351085X
Prefix: 978
Group: 0
Group Name: English language
Group Identifier: 978-0
Registrant: 323
Publication: 51085
Check Digit: 1
Formatted: 978-0-323-51085-1

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