Chemical Mechanical Planarization of Microelectronic Materials

Chemical Mechanical Planarization of Microelectronic Materials Login for the JSON version of this page.

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Title: Chemical Mechanical Planarization of Microelectronic Materials
ISBN-10: 0-471-13827-4
ISBN-13: 978-0-471-13827-3
Author(s): Joseph M. Steigerwald, Ronald J. Gutmann, Shyam P. Murarka
Publisher: J. Wiley, Wiley-VCH
Published: 1997
Format: Hardcover
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Pages: 841
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Description

Metadata

EAN: 9780471138273
ASIN: 0471138274
Prefix: 978
Group: 0
Group Name: English language
Group Identifier: 978-0
Registrant: 471
Publication: 13827
Check Digit: 3
Formatted: 978-0-471-13827-3

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