IEEE SEMI International Semiconductor Manufacturing Science Symposium

IEEE SEMI International Semiconductor Manufacturing Science Symposium
IEEE SEMI International Semiconductor Manufacturing Science Symposium Login for the JSON version of this page.
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Title
IEEE SEMI International Semiconductor Manufacturing Science Symposium
ISBN-10
0-7803-1214-7
ISBN-13
978-0-7803-1214-2
Author(s)
IEEE SEMI International Semiconductor Manufacturing Science Symposium. 5th 1993 San Francisco Calif.
Publisher
Institute of Electrical and Electronics Engineers
Published
1993
Format
Subtitle
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Series
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Imprint
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Pages
743
Language
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Subjects
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Genre
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Description

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Metadata
EAN
9780780312142
ASIN
0780312147
Prefix
978
Group
0
Group Name
English language
Group Identifier
978-0
Registrant
7803
Publication
1214
Check Digit
2
Formatted
978-0-7803-1214-2

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