Optical lithography

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Title: Optical lithography
ISBN-10: 0-8194-4420-0
ISBN-13: 978-0-8194-4420-2
Author(s): Burn Jeng Lin, Jon C. Leachtenauer
Publisher: SPIE Optical Engineering Press, SPIE Press
Published: 2002
Format
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Pages: 321
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Description

Metadata

EAN: 9780819444202
ASIN: 0819444200
Prefix: 978
Group: 0
Group Name: English language
Group Identifier: 978-0
Registrant: 8194
Publication: 4420
Check Digit: 2
Formatted: 978-0-8194-4420-2

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