Process and materials characterization and diagnostics in IC manufacturing
Process and materials characterization and diagnostics in IC manufacturing Login for the JSON version of this page.
- Title
- Process and materials characterization and diagnostics in IC manufacturing
- ISBN-10
- 0-8194-4846-X
- ISBN-13
- 978-0-8194-4846-0
- Author(s)
- Name Missing
- Publisher
- SPIE
- Published
- 2003
- Format
- Subtitle
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- Series
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- Imprint
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- Pages
- 932
- Language
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- Subjects
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- Genre
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Description
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Metadata
- EAN
- 9780819448460
- ASIN
- 081944846X
- Prefix
- 978
- Group
- 0
- Group Name
- English language
- Group Identifier
- 978-0
- Registrant
- 8194
- Publication
- 4846
- Check Digit
- 0
- Formatted
- 978-0-8194-4846-0