Micromachining Technology for Micro Optics and Nano Optics V and Microfabrication Process Technology XII
Micromachining Technology for Micro Optics and Nano Optics V and Microfabrication Process Technology XII Login for the JSON version of this page.
- Title
- Micromachining Technology for Micro Optics and Nano Optics V and Microfabrication Process Technology XII
- ISBN-10
- 0-8194-6575-5
- ISBN-13
- 978-0-8194-6575-7
- Author(s)
- Harold Stewart, Thomas Ann Suleski, Jung Chih Chiao, Mary Maher, Eric Johnson Undifferentiated
- Publisher
- SPIE
- Published
- 2007
- Format
- Subtitle
- Login for full book details.
- Series
- Login to see series details.
- Imprint
- Login for imprint details.
- Pages
- 307
- Language
- Login for language details.
- Subjects
- Login for subjects details.
- Genre
- Login for genre details.
Description
Login for description.
Metadata
- EAN
- 9780819465757
- ASIN
- 0819465755
- Prefix
- 978
- Group
- 0
- Group Name
- English language
- Group Identifier
- 978-0
- Registrant
- 8194
- Publication
- 6575
- Check Digit
- 7
- Formatted
- 978-0-8194-6575-7