Science and Technology of Chemical Mechanical Planarization

Science and Technology of Chemical Mechanical Planarization Login for the JSON version of this page.

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Title: Science and Technology of Chemical Mechanical Planarization
ISBN-10: 1-107-40830-X
ISBN-13: 978-1-107-40830-2
Author(s): Subramanian Balakumar, Higgs C. Fred III, Ashok Kumar, Chad S. Korach
Publisher: University of Cambridge ESOL Examinations
Published: 2014
Format
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Pages: 260
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Description

Metadata

EAN: 9781107408302
ASIN: 110740830X
Prefix: 978
Group: 1
Group Name: English language
Group Identifier: 978-1
Registrant: 107
Publication: 40830
Check Digit: 2
Formatted: 978-1-107-40830-2

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