Fundamental Principles of Optical Lithography

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Title: Fundamental Principles of Optical Lithography
ISBN-10: 1-119-96507-1
ISBN-13: 978-1-119-96507-7
Author(s): Chris Mack
Publisher: Wiley & Sons, Incorporated, John
Published: 2011
Format
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Pages: 958
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Description

Metadata

EAN: 9781119965077
ASIN: 1119965071
Prefix: 978
Group: 1
Group Name: English language
Group Identifier: 978-1
Registrant: 119
Publication: 96507
Check Digit: 7
Formatted: 978-1-119-96507-7

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