Fundamental Principles of Optical Lithography

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Title: Fundamental Principles of Optical Lithography
ISBN-10: 1-282-34881-7
ISBN-13: 978-1-282-34881-3
Author(s): Chris A. Mack
Publisher: Wiley & Sons Canada, Limited, John
Published: 2008
Format
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Pages: 352
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Description

Metadata

EAN: 9781282348813
ASIN: 1282348817
Prefix: 978
Group: 1
Group Name: English language
Group Identifier: 978-1
Registrant: 282
Publication: 34881
Check Digit: 3
Formatted: 978-1-282-34881-3

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