Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies Nato Science Series II Mathematics Physics and Chemistry 55

Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies Nato Science Series II Mathematics Physics and Chemistry 55 Login for the JSON version of this page.

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Title: Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies Nato Science Series II Mathematics Physics and Chemistry 55
ISBN-10: 1-4020-0525-3
ISBN-13: 978-1-4020-0525-1
Author(s): Yves Pauleau
Publisher: Kluwer Academic
Published: 1899
Format: Paperback
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Pages: 876
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Description

Metadata

EAN: 9781402005251
ASIN: 1402005253
Prefix: 978
Group: 1
Group Name: English language
Group Identifier: 978-1
Registrant: 4020
Publication: 0525
Check Digit: 1
Formatted: 978-1-4020-0525-1

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