Lecture Notes on Principles of Plasma Processing

Lecture Notes on Principles of Plasma Processing Login for the JSON version of this page.

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Title: Lecture Notes on Principles of Plasma Processing
ISBN-10: 1-4615-0182-2
ISBN-13: 978-1-4615-0182-4
Author(s): Jane P Chang, Francis F Chen
Publisher: Island Press
Published: 2003
Format
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Pages: 462
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Description

Metadata

EAN: 9781461501824
ASIN: 1461501822
Prefix: 978
Group: 1
Group Name: English language
Group Identifier: 978-1
Registrant: 4615
Publication: 0182
Check Digit: 4
Formatted: 978-1-4615-0182-4

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