Advances in Metrology for X Ray and EUV Optics VII

Advances in Metrology for X Ray and EUV Optics VII
Advances in Metrology for X Ray and EUV Optics VII Login for the JSON version of this page.
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Title
Advances in Metrology for X Ray and EUV Optics VII
ISBN-10
1-5106-1227-0
ISBN-13
978-1-5106-1227-3
Author(s)
Anand Krishna Asundi, Anand Asundi, Lahsen Assoufid, Haruhiko Ohashi
Publisher
SPIE
Published
2017
Format
Subtitle
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Series
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Imprint
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Pages
226
Language
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Subjects
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Genre
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Description

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Metadata
EAN
9781510612273
ASIN
1510612270
Prefix
978
Group
1
Group Name
English language
Group Identifier
978-1
Registrant
5106
Publication
1227
Check Digit
3
Formatted
978-1-5106-1227-3

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