Characterization of Plasma Enhanced Cvd Processes

Characterization of Plasma Enhanced Cvd Processes Login for the JSON version of this page.

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Title: Characterization of Plasma Enhanced Cvd Processes
ISBN-10: 1-55899-053-4
ISBN-13: 978-1-55899-053-1
Author(s): Dale E. Ibbotson, Gerald Lucovsky, Dennis W. Hess
Publisher: Materials Research Society
Published: 1990
Format: Hardcover
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Pages: 307
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Description

Metadata

EAN: 9781558990531
ASIN: 1558990534
Prefix: 978
Group: 1
Group Name: English language
Group Identifier: 978-1
Registrant: 55899
Publication: 053
Check Digit: 1
Formatted: 978-1-55899-053-1

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