Materials Issues and Modeling for Device Nanofabrication

Materials Issues and Modeling for Device Nanofabrication
Materials Issues and Modeling for Device Nanofabrication Login for the JSON version of this page.
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Title
Materials Issues and Modeling for Device Nanofabrication
ISBN-10
1-55899-492-0
ISBN-13
978-1-55899-492-8
Author(s)
Lloyd J. Whitman, Shinji Matsui, Mark F. Gyure, Kenneth E. Gonsalves, Luc T. Wille
Publisher
Materials Research Society
Published
2000
Format
Hardcover
Subtitle
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Series
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Imprint
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Pages
460
Language
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Subjects
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Description

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Metadata
EAN
9781558994928
ASIN
1558994920
Prefix
978
Group
1
Group Name
English language
Group Identifier
978-1
Registrant
55899
Publication
492
Check Digit
8
Formatted
978-1-55899-492-8

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