Physical Design and Mask Synthesis for Directed Self Assembly Lithography

Physical Design and Mask Synthesis for Directed Self Assembly Lithography Login for the JSON version of this page.

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Title: Physical Design and Mask Synthesis for Directed Self Assembly Lithography
ISBN-10: 3-030-09455-3
ISBN-13: 978-3-030-09455-3
Author(s): Youngsoo Shin, Seongbo Shim
Publisher: Springer
Published
Format: paperback
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Pages: 325
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Description

Metadata

EAN: 9783030094553
ASIN: 3030094553
Prefix: 978
Group: 3
Group Name: German language
Group Identifier: 978-3
Registrant: 030
Publication: 09455
Check Digit: 3
Formatted: 978-3-030-09455-3

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