Semiconductor Wafer Fabrication Coatings and Tribology

Semiconductor Wafer Fabrication Coatings and Tribology Login for the JSON version of this page.

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Title: Semiconductor Wafer Fabrication Coatings and Tribology
ISBN-10: 3-0364-0324-8
ISBN-13: 978-3-0364-0324-3
Author(s): Juraj Marek, Zhigang Fang, Gregor Pobegen, Hamada Shoukry, Ulrike Grossner
Publisher: Trans Tech Publications, Limited
Published: 2023
Format
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Pages: 437
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Description

Metadata

EAN: 9783036403243
ASIN: 3036403248
Prefix: 978
Group: 3
Group Name: German language
Group Identifier: 978-3
Registrant: 0364
Publication: 0324
Check Digit: 3
Formatted: 978-3-0364-0324-3

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