Design for Manufacturability with Advanced Lithography

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Title: Design for Manufacturability with Advanced Lithography
ISBN-10: 3-319-20385-1
ISBN-13: 978-3-319-20385-0
Author(s): Bei Yu, David Z. Pan
Publisher: Springer London, Limited
Published: 2015
Format
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Pages: 337
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Description

Metadata

EAN: 9783319203850
ASIN: 3319203851
Prefix: 978
Group: 3
Group Name: German language
Group Identifier: 978-3
Registrant: 319
Publication: 20385
Check Digit: 0
Formatted: 978-3-319-20385-0

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