Design for Manufacturability with Advanced Lithography
Design for Manufacturability with Advanced Lithography Login for the JSON version of this page.
- Title
- Design for Manufacturability with Advanced Lithography
- ISBN-10
- 3-319-37393-5
- ISBN-13
- 978-3-319-37393-5
- Author(s)
- Bei Yu, David Z. Pan
- Publisher
- Springer International Publishing AG
- Published
- 2016
- Format
- Subtitle
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- Series
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- Imprint
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- Pages
- 717
- Language
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- Subjects
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- Genre
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Description
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Metadata
- EAN
- 9783319373935
- ASIN
- 3319373935
- Prefix
- 978
- Group
- 3
- Group Name
- German language
- Group Identifier
- 978-3
- Registrant
- 319
- Publication
- 37393
- Check Digit
- 5
- Formatted
- 978-3-319-37393-5