Etching in microsystem technology

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Title: Etching in microsystem technology
ISBN-10: 3-527-29561-5
ISBN-13: 978-3-527-29561-6
Author(s): J. M. Kohler
Publisher: Wiley-VCH
Published: 1999
Format
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Pages: 463
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Description

Metadata

EAN: 9783527295616
ASIN: 3527295615
Prefix: 978
Group: 3
Group Name: German language
Group Identifier: 978-3
Registrant: 527
Publication: 29561
Check Digit: 6
Formatted: 978-3-527-29561-6

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