Spectroscopic Ellipsometry for the in Situ Investigation of Atomic Layer Depositions

Spectroscopic Ellipsometry for the in Situ Investigation of Atomic Layer Depositions Login for the JSON version of this page.

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Title: Spectroscopic Ellipsometry for the in Situ Investigation of Atomic Layer Depositions
ISBN-10: 3-656-92315-9
ISBN-13: 978-3-656-92315-2
Author(s): Varun Sharma
Publisher: GRIN Verlag GmbH
Published: 2015
Format
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Pages: 240
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Description

Metadata

EAN: 9783656923152
ASIN: 3656923159
Prefix: 978
Group: 3
Group Name: German language
Group Identifier: 978-3
Registrant: 656
Publication: 92315
Check Digit: 2
Formatted: 978-3-656-92315-2

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