Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies

Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies Login for the JSON version of this page.

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Title: Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies
ISBN-10: 94-010-0353-X
ISBN-13: 978-94-010-0353-7
Author(s): Yves Pauleau
Publisher: Imprint, Springer, Springer Netherlands
Published: 2002
Format: [electronic resource] /
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Pages: 359
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Description

Metadata

EAN: 9789401003537
ASIN: 940100353X
Prefix: 978
Group: 94
Group Name: Netherlands
Group Identifier: 978-94
Registrant: 010
Publication: 0353
Check Digit: 7
Formatted: 978-94-010-0353-7

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