D. C. Gupta Books

Semiconductor Fabrication: Technology And Metrology
Semiconductor Fabrication: Technology And Metrology

By National Institute Of Standards And Technology (U.S.), D. C. Gupta, American Society; For Testing And Materials, Dinesh C. Gupta, Semiconductor Equipment And Materials International, ASTM COMPASS, ASTM Committee F-1 On Electronics.

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476 p. : 24 cm Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Elect...

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