Daryush Ila Books

Ion-Beam-Based Nanofabrication: Volume 1020
Ion-Beam-Based Nanofabrication: Volume 1020

By Naoki Kishimoto, Paul K. Chu, ILA, Daryush Ila, DARYUSH, John Baglin, Materials Research Society Fall Meeting (2007 : San Francisco, Calif). Symposium GG

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It is increasingly apparent that ion-beam-based processing offers unique capabilities for fabrication and complex patterning of 3D, 2D or 1D structures at the few-nanometer scale (e.g., nanowires a...

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