David A. Dornfeld Books
Green Manufacturing
Green Manufacturing: Fundamentals and Applications introduces the basic definitions and issues surrounding green manufacturing at the process, machine and system (including supply chain) levels. It...
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Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication
By Jianfeng Luo
This book is the product of a developing research focus on CMP at Berkeley. Its focus is on the important area of process models which have not kept pace with the tremendous expansion of applicatio...
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