Jianfeng Luo Books
Integrated Modeling of Chemical Mechanical Planarization for Sub Micron IC Fabrication
By Jianfeng Luo
This book is the product of a developing research focus on CMP at Berkeley. Its focus is on the important area of process models which have not kept pace with the tremendous expansion of applicatio...
Read More
Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication
By Jianfeng Luo
This book is the product of a developing research focus on CMP at Berkeley. Its focus is on the important area of process models which have not kept pace with the tremendous expansion of applicatio...
Read More