Eric Garfunkel Books

Fundamental aspects of ultrathin dielectrics on Si-based devices
Advanced Materials and Technologies for Micro Nano Devices Sensors and Actuators
Advanced Materials and Technologies for Micro Nano Devices Sensors and Actuators
Fundamental Aspects of Ultrathin Dielectrics on Si based Devices
Fundamental Aspects of Ultrathin Dielectrics on Si based Devices

By Eric Garfunkel

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An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of

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Fundamental Aspects of Ultrathin Dielectrics on Si Based NATO Science Partnership Sub Series 3
Advanced Materials and Technologies for Micro Nano Devices Sensors and Actuators

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