Person Perception And Attribution

By Yogesh B. Gianchandani, Osamu Tabata, Hans Werner Bierhoff, Hans Zappe

comprehensive Microsystems, Is A New 3-volume Reference Work On Microelectromechanical Systems (mems). The Microsystems Field Has Expanded To Embrace A Host Of Technologies, And Microelectronics Ha...

Enabling Technology For MEMS And Nanodevices: Advanced Micro And Nanosystems

By Osamu Tabata, Christofer Hierold, Oliver Brand, Jan G. Korvink, Henry Baltes, Gary K. Fedder, H. Baltes

CMOS - MEMS

By Osamu Tabata, Christofer Hierold, Oliver Brand, Jan G. Korvink, Henry Baltes, Gary K. Fedder

In This Topical Volume, The Combination Of The Globally Established, Billion Dollar Chip Mass Fabrication Technology Cmos With The Fascinating And Commercially Promising New World Of Mems Is Covere...

Microengineering of Metals and Ceramics Part II

By

Reliability of MEMS Advanced Micro and Nanosystems

By

Microengineering of Metals and Ceramics Part I

By

Micro Process Engineering

By

LIGA and its Applications Advanced Micro and Nanosystems

By Volker Saile

Carbon Nanotube Devices

By

Machinaka no runesansu

By Osamu Tabata