Plasma Processing
- Title
- Plasma Processing
- ISBN-10
- 0-931837-34-0
- ISBN-13
- 978-0-931837-34-0
- Author(s)
- J W Coburn
- Publisher
- Materials Research Society
- Published
- 1986
- Format
- Hardcover
Metadata
- EAN
- 9780931837340
- ASIN
- 0931837340
- Prefix
- 978
- Group
- 0
- Group Name
- English language
- Group Identifier
- 978-0
- Registrant
- 931837
- Publication
- 34
- Check Digit
- 0
- Formatted
- 978-0-931837-34-0