Microlithography
- Title
- Microlithography
- ISBN-10
- 1-032-83673-3
- ISBN-13
- 978-1-032-83673-7
- Author(s)
- Kazuaki Suzuki, Bruce W. Smith
- Publisher
- Taylor & Francis Ltd
- Published
- 2024
- Format
Metadata
- EAN
- 9781032836737
- ASIN
- 1032836733
- Prefix
- 978
- Group
- 1
- Group Name
- English language
- Group Identifier
- 978-1
- Registrant
- 032
- Publication
- 83673
- Check Digit
- 7
- Formatted
- 978-1-032-83673-7