Atomic Layer Deposition
Atomic Layer Deposition
by David Cameron, Tommi Kääriäinen, Marja-Leena Kääriäinen, Arthur Sherman
- Title
- Atomic Layer Deposition
- ISBN-10
- 1-118-74742-9
- ISBN-13
- 978-1-118-74742-1
- Publisher
- John Wiley & Sons, Incorporated
- Published
- 2013
- Format
Metadata
- EAN
- 9781118747421
- ASIN
- 1118747429
- Prefix
- 978
- Group
- 1
- Group Name
- English language
- Group Identifier
- 978-1
- Registrant
- 118
- Publication
- 74742
- Check Digit
- 1
- Formatted
- 978-1-118-74742-1