Microlithography

Name: Microlithography
ISBN: 9781315219554

Microlithography

by Kazuaki Suzuki, Bruce W. Smith

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Title: Microlithography
ISBN-10: 1-315-21955-7
ISBN-13: 978-1-315-21955-4
Author(s): Kazuaki Suzuki, Bruce W. Smith
Publisher: Taylor & Francis Group
Published: 2018
Format

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Metadata

EAN: 9781315219554
ASIN: 1315219557
Prefix: 978
Group: 1
Group Name: English language
Group Identifier: 978-1
Registrant: 315
Publication: 21955
Check Digit: 4
Formatted: 978-1-315-21955-4

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