Solid Modeling Applied to Three-Dimensional Semiconductor Process Simulation

Solid Modeling Applied to Three-Dimensional Semiconductor Process Simulation

Solid Modeling Applied to Three-Dimensional Semiconductor Process Simulation

by Marc Westermann

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Title
Solid Modeling Applied to Three-Dimensional Semiconductor Process Simulation
ISBN-10
3-89191-947-6
ISBN-13
978-3-89191-947-7
Author(s)
Marc Westermann
Publisher
Hartung-Gorre, Wolfgang. Wissenschaftliche Publikationen
Published
1995
Format

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Metadata

EAN
9783891919477
ASIN
3891919476
Prefix
978
Group
3
Group Name
German language
Group Identifier
978-3
Registrant
89191
Publication
947
Check Digit
7
Formatted
978-3-89191-947-7

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