Solid Modeling Applied to Three-Dimensional Semiconductor Process Simulation
Solid Modeling Applied to Three-Dimensional Semiconductor Process Simulation
- Title
- Solid Modeling Applied to Three-Dimensional Semiconductor Process Simulation
- ISBN-10
- 3-89191-947-6
- ISBN-13
- 978-3-89191-947-7
- Author(s)
- Marc Westermann
- Publisher
- Hartung-Gorre, Wolfgang. Wissenschaftliche Publikationen
- Published
- 1995
- Format
Metadata
- EAN
- 9783891919477
- ASIN
- 3891919476
- Prefix
- 978
- Group
- 3
- Group Name
- German language
- Group Identifier
- 978-3
- Registrant
- 89191
- Publication
- 947
- Check Digit
- 7
- Formatted
- 978-3-89191-947-7