Microlithography
Microlithography
by Aldo Craievich, Vitor Baranauskas, Gerardo Gerson Bezzera De Souza
- Title
- Microlithography
- ISBN-10
- 981-02-0137-0
- ISBN-13
- 978-981-02-0137-1
- Publisher
- World Scientific Publishing Co Pte Ltd
- Published
- 1990
- Format
- Hardcover
Metadata
- EAN
- 9789810201371
- ASIN
- 9810201370
- Prefix
- 978
- Group
- 981
- Group Name
- Singapore
- Group Identifier
- 978-981
- Registrant
- 02
- Publication
- 0137
- Check Digit
- 1
- Formatted
- 978-981-02-0137-1